Analysis of formulas for calculating the main characteristics of backscattered electrons and how they compare to experimental results

Analysis of formulas for calculating the main characteristics of backscattered electrons and how they compare to experimental results

Semiempirical relations for the following basic parameters of backscattered electrons in a scanning electron microscope are derived: reflection coefficient; average and most probable energies; energy spectra; and energy of backscattered electrons, depending on the angle of exit. The energy dependenc...

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Veröffentlicht in:Bulletin of the Russian Academy of Sciences. Physics 2013-08, Vol.77 (8), p.951-958
Hauptverfasser: Rau, E. I., Ditsman, S. A., Zaitsev, S. V., Lermontov, N. V., Luk’yanov, A. E., Kupreenko, S. Yu
Format: Artikel
Sprache:eng
Schlagworte:
Backscattering
Electrons
Energy spectra
Hadrons
Heavy Ions
Mathematical analysis
Microscopes
Nuclear Physics
Physics
Physics and Astronomy
Proceedings of the XXIV Russian Conference on Electron Microscopy (SEM-2012)
Reflectance
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Zusammenfassung:Semiempirical relations for the following basic parameters of backscattered electrons in a scanning electron microscope are derived: reflection coefficient; average and most probable energies; energy spectra; and energy of backscattered electrons, depending on the angle of exit. The energy dependence is shown to have a maximum in the angular region of backscattered electrons Θ = 65°–75°.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873813080364