Carbon‐MEMS‐Based Alternating Stacked MoS2@rGO‐CNT Micro‐Supercapacitor with High Capacitance and Energy Density

A novel process to fabricate a carbon‐microelectromechanical‐system‐based alternating stacked MoS2@rGO–carbon‐nanotube (CNT) micro‐supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin‐coating of MoS2@rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS2@rGO and CNTs are embedded in the carbon microelectrodes, which cooperatively enhance the performance of the MSC. The fabricated MSC exhibits a high areal capacitance of 13.7 mF cm−2 and an energy density of 1.9 µWh cm−2 (5.6 mWh cm−3), which exceed many reported carbon‐ and MoS2‐based MSCs. The MSC also retains 68% of capacitance at a current density of 2 mA cm−2 (5.9 A cm−3) and an outstanding cycling performance (96.6% after 10 000 cycles, at a scan rate of 1 V s−1). Compared with other MSCs, the MSC in this study is fabricated by a low‐cost and facile process, and it achieves an excellent and stable electrochemical performance. This approach could be highly promising for applications in integration of micro/nanostructures into microdevices/systems. A photoresist‐derived carbon‐based all‐solid‐state micro‐supercapacitor with embedded MoS2@rGO and carbon nanotubes, which cooperatively enhances the performance of a micro‐supercapacitor, is described. It is demonstrated that the micro‐supercapacitor fabricated by this novel microfabrication process has high capacitance, high energy density, and remarkable cycling performance. The microstructuring of alternating stacked MoS2@rGO/carbon and CNT/carbon for micro‐supercapacitors is a highly effective approach to achieve high‐performance microdevices.