The influence of the formation and storage conditions of silicon nanoparticles obtained by laser-induced pyrolysis of monosilane on the nature and properties of defects

A detailed study of the paramagnetic properties of silicon nanoparticles obtained by laser-induced pyrolysis of monosilane is carried out by the method of electron-paramagnetic-resonance spectroscopy as dependent on the conditions of subsequent processing and storage. Defects of the P b 0 -, P b 1 -, and D -center types are detected, and their parameters and concentration values are determined. It is established that the defects in the studied structures are centers of nonradiative recombination. It is shown that, to obtain samples with low concentrations of paramagnetic centers and stable luminescence, the procedure of etching the original silicon nanoparticles in an aqueous solution of HF and HNO 3 acid followed by natural oxidation under normal conditions can be used.