Precision measurement of Z-slide vertical error motion of an ultra-precision lathe by using three-probe method

This paper presents a precision measurement of the Z -slide vertical error motion of an ultra-precision lathe based on a three-probe measurement method. The vertical error motion of the Z -slide, which is composed of the vertical parallelism error motion and the vertical straightness error motion, is measured by utilizing three displacement measuring probes to scan a self-cut roll workpiece and an accurate straightedge, respectively. A series of factors which could influence the measurement of the vertical error motion, including the error motion of the spindle, the surface form error of the reference object and the horizontal error motion of the Z -slide, are all successfully removed by using the proposed three-probe measurement system with an error separation method. The influence of the gravity induced deflection of the roll workpiece on the measurement of the Z -slide vertical parallelism error motion is also discussed. Experiments were carried out to verify the feasibility of the proposed methods on a three-axis ultra-precision lathe. The vertical straightness error motion was evaluated to be 133 nm with a measurement repeatability of 21 nm and the vertical parallelism error motion was evaluated to be 12.1 μm with a measurement repeatability of 38 nm.