The use of lamb waves for measuring the thicknesses of thin metal films

The use of lamb waves for measuring the thicknesses of thin metal films

An experimental device that allows the determination of the thicknesses of thin metal films in the micron range is described. The method is based on the use of the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along a film on its thickness. The measurement accu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Instruments and experimental techniques (New York) 2017-03, Vol.60 (2), p.284-286
Hauptverfasser: Tolipov, Kh. B., Kleshchev, D. G., Berezin, V. M.
Format: Artikel
Sprache:eng
Schlagworte:
Electrical Engineering
Laboratory Techniques
Measurement Science and Instrumentation
Phase velocity
Physical Chemistry
Physics
Physics and Astronomy
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An experimental device that allows the determination of the thicknesses of thin metal films in the micron range is described. The method is based on the use of the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along a film on its thickness. The measurement accuracy was 8% and was virtually independent of the film thickness.
ISSN:0020-4412
1608-3180
DOI:10.1134/S0020441217020142