Estimation of Al2O3 critical temperature using a Langmuir probe in laser ablation

Pulsed laser deposition (PLD) has demonstrated its capacity in thin films growing under the moderate laser intensity. But when the laser intensity increases, the presence of droplets on the thin film limits the PLD efficiency such that the process needs an optimization study. In this way, an experimental study has been conducted in order to correlate between the appearance of those droplets and the laser fluence. The comprehension of the physical mechanism during ablation and the control of the deposition parameters allowed to get a safe process. Our experiment consists in measuring the amount of ejected matter from polycrystalline alumina target as a function of the laser fluence when irradiated by a KrF laser. According to laser fluence, several kinds of ablation regimes have been identified. Below a threshold value found as 12 J/cm 2 , the mechanism of ablation was assigned to normal evaporation, desorption and nonthermal processes. While above this threshold value, the mechanism of ablation was assigned to phase explosion phenomenon which is responsible of droplets formation when the surface temperature approaches the critical temperature T tc . A negative charge collector was used to collect the positive ions in the plume. Their times of flight (TOF) signal were used to estimate the appropriate T tc for alumina target. Ions yield, current as well as kinetic energy were deduced from the TOF signal. Their evolutions show the occurrence of an optical breakdown in the vapor plume which is well correlated with the onset of the phase explosion phenomenon. At 10 J/cm 2 , the ions velocities collected by the probe have been compared to those obtained from optical emission spectroscopy diagnostic and were discussed. To prove the occurrence of phase explosion by the appearance of droplets, several thin films were elaborated on Si (100) substrate at different laser fluence into vacuum. They have been characterized by scanning electron microscope. The results were well correlated with those obtained with mass measurements as function of laser fluence.