Size and Charge Distributions of Stable Clusters Formed in Ion Sputtering of Metals

A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenie...

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Veröffentlicht in:Russian physics journal 2016-10, Vol.59 (6), p.768-774
Hauptverfasser: Matveev, V. I., Kapustin, S. N.
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description A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenient for practical application. As an example, calculations of the total yield of stable neutral and charged clusters of silver, indium, and niobium are carried out.
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ispartof Russian physics journal, 2016-10, Vol.59 (6), p.768-774
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source SpringerNature Journals
subjects Charge distribution
Clusters
Condensed Matter Physics
Condensed-State Physics
Hadrons
Heavy Ions
Lasers
Mathematical and Computational Physics
Molecular dynamics
Niobium
Nuclear Physics
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Silver
Sputtering
Theoretical
title Size and Charge Distributions of Stable Clusters Formed in Ion Sputtering of Metals
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