Size and Charge Distributions of Stable Clusters Formed in Ion Sputtering of Metals

A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenie...

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Veröffentlicht in:	Russian physics journal 2016-10, Vol.59 (6), p.768-774
Hauptverfasser:	Matveev, V. I., Kapustin, S. N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Charge distribution Clusters Condensed Matter Physics Condensed-State Physics Hadrons Heavy Ions Lasers Mathematical and Computational Physics Molecular dynamics Niobium Nuclear Physics Optical Devices Optics Photonics Physics Physics and Astronomy Silver Sputtering Theoretical
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Beschreibung
Zusammenfassung:	A theory of ion sputtering of metals in the form of neutral and charged clusters with their subsequent fragmentation into the stable state is developed. The theory is based on simple physical assumptions and is in good agreement with experiment. Results are presented in the form of formulas convenient for practical application. As an example, calculations of the total yield of stable neutral and charged clusters of silver, indium, and niobium are carried out.
ISSN:	1064-8887 1573-9228
DOI:	10.1007/s11182-016-0835-3