A facility for measuring the thickness of thin metal films

A facility for measuring the thickness of thin metal films

A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic wa...

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Veröffentlicht in:Russian journal of nondestructive testing 2016-10, Vol.52 (10), p.554-556
1. Verfasser: Tolipov, Kh. B.
Format: Artikel
Sprache:eng
Schlagworte:
Acoustic Methods
Characterization and Evaluation of Materials
Chemistry and Materials Science
Materials Science
Phase velocity
Structural Materials
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Beschreibung
Zusammenfassung:A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.
ISSN:1061-8309
1608-3385
DOI:10.1134/S1061830916100090