Properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering method

Properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering method

This article describes investigations into the properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering on glass substrates in argon atmosphere. Transmittance spectra of the obtained films are studied by spectrophotometry in the range from 300 to 900 nm; the b...

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Veröffentlicht in:Inorganic materials : applied research 2017, Vol.8 (1), p.166-171
Hauptverfasser: An, V. V., Pogrebenkov, V. M., Zakharov, A. N.
Format: Artikel
Sprache:eng
Schlagworte:
Argon
Chemistry
Chemistry and Materials Science
Copper sulfides
Glass substrates
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Magnetic properties
Magnetron sputtering
Materials Science
Spectrophotometry
Thickness
Thin films
Tungsten disulfide
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Zusammenfassung:This article describes investigations into the properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering on glass substrates in argon atmosphere. Transmittance spectra of the obtained films are studied by spectrophotometry in the range from 300 to 900 nm; the band gaps are determined. The thickness of the obtained films varies in the range of 0.5–1 μm.
ISSN:2075-1133
2075-115X
DOI:10.1134/S207511331701004X