3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam

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Veröffentlicht in:Microscopy and microanalysis 2014-08, Vol.20 (S3), p.354-355
Hauptverfasser: Man, Xin, Asahata, Tatsuya, Uemoto, Atsushi, Susuki, Hidekazu, Suzuki, Hiroyuki, Hasuda, Masakatsu, Fujii, Toshiaki
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15 Years of Focused Ion Beams at M & M
Advances in Instrumentation Symposia
Sample preparation
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container_end_page 355
container_issue S3
container_start_page 354
container_title Microscopy and microanalysis
container_volume 20
creator Man, Xin
Asahata, Tatsuya
Uemoto, Atsushi
Susuki, Hidekazu
Suzuki, Hiroyuki
Hasuda, Masakatsu
Fujii, Toshiaki
description
doi_str_mv 10.1017/S1431927614003493
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ispartof Microscopy and microanalysis, 2014-08, Vol.20 (S3), p.354-355
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source Cambridge University Press Journals Complete
subjects 15 Years of Focused Ion Beams at M & M
Advances in Instrumentation Symposia
Sample preparation
title 3D Atom Probe Microscopy Sample Preparation by Using L-Shape FIB-SEM-Ar Triple Beam
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