A Reconfigurable Control System for a PA-PVD Technology Test Stand

The construction of technological test stands is connected with the problem of a proper determination of the structure of the stands enabling the execution of technological processes with different types of instruments and devices. The article presents the test stand for Plasma–Assisted Physical Vap...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Solid state phenomena 2015, Vol.220-221, p.504-509
Hauptverfasser: Przybylski, Jan, Neska, Mirosław, Majcher, Andrzej
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The construction of technological test stands is connected with the problem of a proper determination of the structure of the stands enabling the execution of technological processes with different types of instruments and devices. The article presents the test stand for Plasma–Assisted Physical Vapour Deposition (PA-PVD) technological processes. The configurability of the stand was achieved thanks to the modular structure of the stand and the use of appropriate software and hardware solutions. The authors describe the developed solution facilitating the execution of plasma processes applied for surface engineering.
ISSN:1012-0394
1662-9779
1662-9779
DOI:10.4028/www.scientific.net/SSP.220-221.504