A Broadside-Coupled Meander-Line Resonator in 0.13-[Formula Omitted] SiGe Technology for Millimeter-Wave Application

An on-chip resonator is designed and fabricated using a standard 0.13-[Formula Omitted] SiGe technology for millimeter-wave applications. The designed resonator is based on a unique structure, which consists of two broadside-coupled meander lines with opposite orientation. The equivalent [Formula Omitted] circuit of the resonator is given, while the impact of the structure on the resonance frequencies is investigated. Using this structure along with capacitors, a compact bandpass filter (BPF) is also designed and fabricated. The measured results show that the resonator can generate a resonance at 57 GHz with the attenuation better than 13.7 dB, while the BPF has a center frequency at 31 GHz and a insertion loss of 2.4 dB. The chip size of both the resonator and the BPF, excluding the pads, is only 0.024 mm2 ([Formula Omitted] mm[Formula Omitted].