Resonant Reflectance in Silicon Nanorods Arrays
The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx...
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| Veröffentlicht in: | Solid state phenomena 2015-10, Vol.245, p.8-13 |
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| container_title | Solid state phenomena |
| container_volume | 245 |
| creator | Latyshev, Alexander Vasilevich Gavrilova, T.A. Talochkin, Alexander B. Golobokova, Lyudmila S. Nastaushev, Yuri V. Dultsev, Fedor N. |
| description | The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx nanolayer. Tunable color generation from vertical silicon nanorods is demonstrated too. |
| doi_str_mv | 10.4028/www.scientific.net/SSP.245.8 |
| format | Article |
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| title | Resonant Reflectance in Silicon Nanorods Arrays |
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