Resonant Reflectance in Silicon Nanorods Arrays

Resonant Reflectance in Silicon Nanorods Arrays

The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx...

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Veröffentlicht in:Solid state phenomena 2015-10, Vol.245, p.8-13
Hauptverfasser: Latyshev, Alexander Vasilevich, Gavrilova, T.A., Talochkin, Alexander B., Golobokova, Lyudmila S., Nastaushev, Yuri V., Dultsev, Fedor N.
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Sprache:eng
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Zusammenfassung:The optical properties of ordered arrays of silicon nanorods (Si NRs) were investigated. Electron Beam Lithography followed by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) was used for Si NRs fabrication. Si NRs were chemically and electrically passivated through the deposition of TiONx nanolayer. Tunable color generation from vertical silicon nanorods is demonstrated too.
ISSN:1012-0394
1662-9779
1662-9779
DOI:10.4028/www.scientific.net/SSP.245.8