Magnetically controlled MEMS switches with nanoscale contact coatings

The paper reports the tests results of ruthenium contacts coatings of magnetically controlled MEMS switches. During the tests the contact resistance was measured and the lifetime of MEMS switches was evaluated. After testing the analysis of the form and contact surface structure using SEM-method was...

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Bibliographische Detailangaben
Hauptverfasser:	Karabanov, S.M, Karabanov, A.S, Suvorov, D.V, Grappe, B, Coutier, C, Sibuet, H, Sazhin, B.N
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Electrical contacts Fabrication of MEMS and NEMS devices Thin film growth and epitaxy
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	The paper reports the tests results of ruthenium contacts coatings of magnetically controlled MEMS switches. During the tests the contact resistance was measured and the lifetime of MEMS switches was evaluated. After testing the analysis of the form and contact surface structure using SEM-method was carried out. The experiment results showed that the application of ruthenium nanolayers as the contact coating at slight increase of the contact resistance improves the lifetime of MEMS switches considerably.
DOI:	10.1049/cp.2012.0675