Macromol. Rapid Commun. 3/2016

Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be fun...

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Veröffentlicht in:	Macromolecular rapid communications. 2016-02, Vol.37 (3), p.232-232
Hauptverfasser:	Fimberger, Martin, Behrendt, Andreas, Jakopic, Georg, Stelzer, Franz, Kumbaraci, Volkan, Wiesbrock, Frank
Format:	Artikel
Sprache:	eng
Schlagworte:	absorption coefficient photolithography poly(2-oxazoline)s ring-opening polymerization
Online-Zugang:	Volltext
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