Macromol. Rapid Commun. 3/2016

Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be fun...

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Veröffentlicht in:Macromolecular rapid communications. 2016-02, Vol.37 (3), p.232-232
Hauptverfasser: Fimberger, Martin, Behrendt, Andreas, Jakopic, Georg, Stelzer, Franz, Kumbaraci, Volkan, Wiesbrock, Frank
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Sprache:eng
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Zusammenfassung:Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be functionalized with the chromophore anthracene (Huisgen cycloaddition involving the yne functions) and subsequently crosslinked (thiol‐ene reaction involving the ene functions). Such copoly(2‐oxazoline)‐based films decrease swing‐curves by 50%, indicative of a significantly enhanced resolution of the photoresists. Further details can be found in the article by M. Fimberger, A. Behrendt, G. Jakopic, F. Stelzer, V. Kumbaraci, and F. Wiesbrock* on page 233.
ISSN:1022-1336
1521-3927
DOI:10.1002/marc.201670013