Macromol. Rapid Commun. 3/2016

Macromol. Rapid Commun. 3/2016

Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be fun...

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Veröffentlicht in:Macromolecular rapid communications. 2016-02, Vol.37 (3), p.232-232
Hauptverfasser: Fimberger, Martin, Behrendt, Andreas, Jakopic, Georg, Stelzer, Franz, Kumbaraci, Volkan, Wiesbrock, Frank
Format: Artikel
Sprache:eng
Schlagworte:
absorption coefficient
photolithography
poly(2-oxazoline)s
ring-opening polymerization
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container_end_page 232
container_issue 3
container_start_page 232
container_title Macromolecular rapid communications.
container_volume 37
creator Fimberger, Martin
Behrendt, Andreas
Jakopic, Georg
Stelzer, Franz
Kumbaraci, Volkan
Wiesbrock, Frank
description Frontispiece: Bottom antireflective coatings (BARCs) are cast between a substrate and a photoresist and are intended to minimize the intensity of reflected light waves. Hence, they are one key strategy for enhancing the resolution of photoresists. Ene‐ and yne‐bearing copoly(2‐oxazoline)s can be functionalized with the chromophore anthracene (Huisgen cycloaddition involving the yne functions) and subsequently crosslinked (thiol‐ene reaction involving the ene functions). Such copoly(2‐oxazoline)‐based films decrease swing‐curves by 50%, indicative of a significantly enhanced resolution of the photoresists. Further details can be found in the article by M. Fimberger, A. Behrendt, G. Jakopic, F. Stelzer, V. Kumbaraci, and F. Wiesbrock* on page 233.
doi_str_mv 10.1002/marc.201670013
format Article
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subjects absorption coefficient
photolithography
poly(2-oxazoline)s
ring-opening polymerization
title Macromol. Rapid Commun. 3/2016
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