Highly reliable mobile liquid crystal display using AlOx deposited by atomic layer deposition for side sealing structure

A side sealing structure including, outside a sealant, AlOx deposited using an atomic layer deposition apparatus was employed for a low‐frequency driving liquid crystal display (LCD) with a bezel width of 0.7 mm. This side‐sealing structure can effectively prevent the entry of external moisture. Prevention of decrease in voltage‐holding ratio was confirmed with a test cell having this structure. A narrow‐bezel LCD with c‐axis‐aligned a‐b‐plane‐anchored crystal In‐Ga‐Zn Oxide backplane can have long‐term high reliability as a low‐frequency driving LCD. A side‐sealing structure, including, outside a sealant, AlOx deposited using an atomic layer deposition apparatus, was employed for a low‐frequency driving liquid crystal display with a bezel width of 0.7 mm. This side sealing structure can effectively prevent the entry of external moisture. Prevention of decrease in voltage holding ratio was confirmed. A narrow‐bezel display with c‐axis‐aligned a‐b‐plane‐anchored crystal In‐Ga‐Zn oxide backplane can have a long‐term high reliability as a low‐frequency driving display.