Amorphous phase in electrochemically oxidized porous silicon
An amorphous phase has been demonstrated in porous silicon prepared by anodization of silicon wafers. The radial distribution function has been calculated on the basis of the X-ray diffraction pattern recorded from a typical sample. There was revealed an amorphous phase of composition SiO 1-6 .
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Veröffentlicht in: | Philosophical magazine. A, Physics of condensed matter. Defects and mechanical properties Physics of condensed matter. Defects and mechanical properties, 1996-06, Vol.73 (6), p.1725-1731 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | An amorphous phase has been demonstrated in porous silicon prepared by anodization of silicon wafers. The radial distribution function has been calculated on the basis of the X-ray diffraction pattern recorded from a typical sample. There was revealed an amorphous phase of composition SiO
1-6
. |
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ISSN: | 0141-8610 1460-6992 |
DOI: | 10.1080/01418619608243009 |