Amorphous phase in electrochemically oxidized porous silicon

An amorphous phase has been demonstrated in porous silicon prepared by anodization of silicon wafers. The radial distribution function has been calculated on the basis of the X-ray diffraction pattern recorded from a typical sample. There was revealed an amorphous phase of composition SiO 1-6 .

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Veröffentlicht in:Philosophical magazine. A, Physics of condensed matter. Defects and mechanical properties Physics of condensed matter. Defects and mechanical properties, 1996-06, Vol.73 (6), p.1725-1731
Hauptverfasser: Popescu, Mihai A., Chumash, Valentin N., Cojocaru, Ion, Jain, Vinod K., Gupta, Amita
Format: Artikel
Sprache:eng
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Zusammenfassung:An amorphous phase has been demonstrated in porous silicon prepared by anodization of silicon wafers. The radial distribution function has been calculated on the basis of the X-ray diffraction pattern recorded from a typical sample. There was revealed an amorphous phase of composition SiO 1-6 .
ISSN:0141-8610
1460-6992
DOI:10.1080/01418619608243009