Influence of Postdeposition Cooling Atmosphere on Thermoelectric Properties of 2% Al-Doped ZnO Thin Films Grown by Pulsed Laser Deposition

We have investigated the thermoelectric properties of 2% Al-doped ZnO (AZO) thin films depending on the postdeposition cooling atmosphere [in oxygen pressure (AZO-O) or vacuum (AZO-V)]. Thin films were grown by pulsed laser deposition on sapphire ( Al 2 O 3 ) substrates at various deposition temperatures ( 400 ∘ C to 600 ∘ C ). All films were c -axis oriented. The electrical conductivity of AZO-V thin films was higher than that of AZO-O thin films across the whole temperature range from 300 K to 600 K, due to the optimal carrier concentration ( 10 20 cm - 3 ) of AZO-V samples. Furthermore, the thermoelectric performance of AZO-V films increased with the deposition temperature; for instance, the highest power factor of 0.87 × 10 - 3 W m - 1 K - 2 and dimensionless figure of merit of 0.07 at 600 K were found for AZO-V thin film deposited at 600 ∘ C .