Detection Technique With Alpha-Tracking and Emissivity Comparison
We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10 -2 alphas/kh-cm 2 using a normal detector. We measured various large-scale integration materials using this...
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Veröffentlicht in: | IEEE transactions on nuclear science 2014-12, Vol.61 (6), p.3438-3442 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10 -2 alphas/kh-cm 2 using a normal detector. We measured various large-scale integration materials using this technique. |
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ISSN: | 0018-9499 1558-1578 |
DOI: | 10.1109/TNS.2014.2359472 |