Detection Technique With Alpha-Tracking and Emissivity Comparison

We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10 -2 alphas/kh-cm 2 using a normal detector. We measured various large-scale integration materials using this...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on nuclear science 2014-12, Vol.61 (6), p.3438-3442
Hauptverfasser: Mori, Hiroko, Uemura, Taiki, Matsuyama, Hideya, Yamazaki, Takashi, Soeda, Takeshi
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10 -2 alphas/kh-cm 2 using a normal detector. We measured various large-scale integration materials using this technique.
ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.2014.2359472