46.5L: Late-News Paper: Large Area Sputtered Al2O3 Films for High Mobility AM-TFT Backplanes on PVD Array System PiVot 55kVi2
The production worthiness of sputtered Al2O3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot™ is demonstrated in order to provide increased stability to IGZO AM‐OLED backplanes. The achieved Al2O3 layer properties and uniformity illustrate the advantages of using r...
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| Veröffentlicht in: | SID International Symposium Digest of technical papers 2013-06, Vol.44 (1), p.647-650 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | The production worthiness of sputtered Al2O3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot™ is demonstrated in order to provide increased stability to IGZO AM‐OLED backplanes. The achieved Al2O3 layer properties and uniformity illustrate the advantages of using rotary technology. |
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| ISSN: | 0097-966X 2168-0159 |
| DOI: | 10.1002/j.2168-0159.2013.tb06294.x |