Optical and structural properties of Al2O3/ZnO nanolaminates deposited by ALD method

Optical and structural properties of Al2O3/ZnO nanolaminates deposited by ALD method

We report on the investigation of optical and structural properties of Al2O3/ZnO nanolaminates. The nanolaminates were deposited on Si and glass substrates by Atomic layer deposition method. Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was perf...

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Veröffentlicht in:Physica status solidi. C 2014-09, Vol.11 (9-10), p.1505-1508
Hauptverfasser: Chaaya, Adib Abou, Viter, Roman, Baleviciute, Ieva, Bechelany, Mikhael, Ramanavicius, Arunas, Erts, Donats, Smyntyna, Valentyn, Miele, Philipe
Format: Artikel
Sprache:eng
Schlagworte:
ALD
ellipsometry
Glass substrates
nanolaminates
optical properties
photoluminescence
Semiconductors
Solar energy
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Zusammenfassung:We report on the investigation of optical and structural properties of Al2O3/ZnO nanolaminates. The nanolaminates were deposited on Si and glass substrates by Atomic layer deposition method. Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence spectroscopy. Complex analysis of monolayer properties was done by ellipsometry. Optical constants for Al2O3 and ZnO monolayer were calculated.
ISSN:1862-6351
1610-1642
DOI:10.1002/pssc.201300607