Self-Aligned Electrodes on SU-8 Negative Photoresist Pedestals

We report a novel technique by which self-aligned thin-film electrodes are fabricated on SU-8 negative photoresist pedestals. A bilayer aluminum and titanium structure is used to align the thin-film electrode and to serve as the optical mask for the UV exposure of the SU-8. The SU-8 developer is use...

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Veröffentlicht in:	Journal of microelectromechanical systems 2014-06, Vol.23 (3), p.508-510
Hauptverfasser:	Fok, H. Raymond, Jackson, Thomas N.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Applied sciences Bio-MEMS Biological and medical sciences Biosensors Biotechnology Electrodes Electronics Etching Exact sciences and technology Fundamental and applied biological sciences. Psychology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques MEMS Methods. Procedures. Technologies Micro- and nanoelectromechanical devices (mems/nems) Micromechanical devices Micromechanical devices and systems negative photoresist Physics Resists self-aligned Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices SU-8 Titanium Various methods and equipments
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Beschreibung
Zusammenfassung:	We report a novel technique by which self-aligned thin-film electrodes are fabricated on SU-8 negative photoresist pedestals. A bilayer aluminum and titanium structure is used to align the thin-film electrode and to serve as the optical mask for the UV exposure of the SU-8. The SU-8 developer is used to remove both the unexposed SU-8 and the bilayer structure of aluminum and titanium. The result is a thin-film electrode aligned on an SU-8 pedestal with a minimal undercut beneath the thin-film electrode.
ISSN:	1057-7157 1941-0158
DOI:	10.1109/JMEMS.2014.2313723