Evaluation and Solutions for P/E Window Instability Induced by Electron Trapping in High- \kappa Intergate Dielectrics of Flash Memory Cells

High density of electron trapping in high-κ intergate dielectric (IGD) materials remains a major concern for planar memory cells with either poly-Si or hybrid floating gates (FGs). In this paper, for the first time, using the ultrafast I-V measurements, it is demonstrated that a significant portion...

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Veröffentlicht in:IEEE transactions on electron devices 2014-05, Vol.61 (5), p.1299-1306
Hauptverfasser: Baojun Tang, Wei Dong Zhang, Degraeve, Robin, Breuil, Laurent, Blomme, Pieter, Jian Fu Zhang, Zhigang Ji, Zahid, Mohammed, Toledano-Luque, Maria, Van den Bosch, Geert, Van Houdt, Jan
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Sprache:eng
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