Low-Voltage Field Ionization of Gases Up to Torr-Level Pressures Using Massive Arrays of Self-Aligned Gated Nanoscale Tips

Low-Voltage Field Ionization of Gases Up to Torr-Level Pressures Using Massive Arrays of Self-Aligned Gated Nanoscale Tips

Large arrays of self-aligned gated nanoscale tips (320000 tips in 32 mm 2 with average radii

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Bibliographische Detailangaben
Veröffentlicht in:IEEE transactions on electron devices 2014-05, Vol.61 (5), p.1520-1528
Hauptverfasser: Fomani, Arash A., Velasquez-Garcia, Luis Fernando, Akinwande, Akintunde Ibitayo
Format: Artikel
Sprache:eng
Schlagworte:
Analytical instruments
Arrays
Devices
Dielectrics
Electric potential
Electrodes
Failure
Field ionization
field ionization (FI)
gated tip arrays
Ionization
Iron
Logic gates
Nanostructure
self-aligned structure
Silicon
Substrates
Surface chemistry
Tips
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Beschreibung
Zusammenfassung:Large arrays of self-aligned gated nanoscale tips (320000 tips in 32 mm 2 with average radii
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2014.2310637