Development of Pulsed Power Technology and Its Wide Applications

For the wide applications of pulsed power technology, highly repetitive pulsed power generators have been recently developed by use of semiconductor switches. Two examples of recent topics will be introduced. One is a combination of an inductive energy storage and semiconductor opening switch. It produces a sharp voltage spike, which is followed by capacitor discharge with long pulse width. It will be used for excimer laser excitation. Another is stacked MOS-FETs, which can be used in the power supply for the accelerators. Various applications of pulsed electromagnetic energy will be expected using highly rep-rated pulsed power generators.