Evaluation of Template Releasing Energy in Nanoimprint Lithography

To investigate template releasing process in nanoimprint lithography, template releasing energy from resist polymer is evaluated under various conditions using test rig. The template releasing energy is proportional to the surface energy of the template, however it does not depend on rigidness of th...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2013/06/25, Vol.26(1), pp.137-141
Hauptverfasser:	Nishino, Tomoki, Fujita, Honoka, Kawata, Hiraoka, Hirai, Yoshihiko
Format:	Artikel
Sprache:	eng
Schlagworte:	adhesion nanoimprint releasing energy surface energy template
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Beschreibung
Zusammenfassung:	To investigate template releasing process in nanoimprint lithography, template releasing energy from resist polymer is evaluated under various conditions using test rig. The template releasing energy is proportional to the surface energy of the template, however it does not depend on rigidness of the system and template lifting speed.
ISSN:	0914-9244 1349-6336
DOI:	10.2494/photopolymer.26.137