Deposition by Velocity Selection of Laser Ablated Particles
An apparatus with a rotating mechanical chopper for thin film production has been developed. It is demonstrated that the energy of ablated particles is well selected by this method. Further, this method is applicable to Au thin film deposition and, is recognized to be useful to improve thin film qua...
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Veröffentlicht in: | Rēzā kenkyū 1995/05/29, Vol.23(5), pp.364-367 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | An apparatus with a rotating mechanical chopper for thin film production has been developed. It is demonstrated that the energy of ablated particles is well selected by this method. Further, this method is applicable to Au thin film deposition and, is recognized to be useful to improve thin film quality because the number of droplets in the film are drastically decreased. |
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ISSN: | 0387-0200 1349-6603 |
DOI: | 10.2184/lsj.23.364 |