Band Selection and Output Prediction of a XeCl Laser

Band Selection and Output Prediction of a XeCl Laser

The 0-1 band selection of a XeC1 excimer laser was performed by using a solid etalon, with the aid of the OH absorption in the 0-2 band. Owing to the spectral width of the 0-1 band reduced to 13 pm and to the effectively reduced energy of the 0-2 band, brightness was increased by a factor of 13. The...

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Veröffentlicht in:Rēzā kenkyū 1990/06/29, Vol.18(6), pp.421-427
Hauptverfasser: HYODO, Masaharu, OHI, Misao
Format: Artikel
Sprache:eng
Schlagworte:
Band selection
Output prediction
XeCl excimer laser
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Zusammenfassung:The 0-1 band selection of a XeC1 excimer laser was performed by using a solid etalon, with the aid of the OH absorption in the 0-2 band. Owing to the spectral width of the 0-1 band reduced to 13 pm and to the effectively reduced energy of the 0-2 band, brightness was increased by a factor of 13. The band selected output energy density, 11.0 mJ/cm2, is in good agreement with the value, 11.1 mJ/cm2, predicted from a simple model.
ISSN:0387-0200
1349-6603
DOI:10.2184/lsj.18.6_421