Narrow-Linewidth KrF Excimer Laser Using a Self-Amplification Resonator

A narrow linewidth excimer laser for photo-micro-lithography has been investigated . To satisfy the need for both high power and long lifetime of narrowing optics, we developed an original self-amplificaton resonator with two etalons and a prism.An out putpower of 8 watts with a spectralinewidth of 1.0pm can be obtained at a pulse repetition rate of 600pps by using the resonator we developed.An estimated intracavity laser power intensity through the etalonsis1/10and output power is twice that with a conventional narrowlinewidth resonator.