High Brightness Excimer Laser Oscillator-Amplifier
In order to increase the brightness and coherence of a tunable UV excimer laser, we studied an oscillator-amplifier configuration by using one laser discharge tube. Line-narrowing to 0.12 pm is achieved by using a grating and two etalons in the oscillator. The output energy and the brightness can be...
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| Veröffentlicht in: | Rēzā kenkyū 1989/01/18, Vol.17(1), pp.50-57 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | In order to increase the brightness and coherence of a tunable UV excimer laser, we studied an oscillator-amplifier configuration by using one laser discharge tube. Line-narrowing to 0.12 pm is achieved by using a grating and two etalons in the oscillator. The output energy and the brightness can be enhanced greatly by injecting an oscillation beam into the unused volume of the discharge tube. |
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| ISSN: | 0387-0200 1349-6603 |
| DOI: | 10.2184/lsj.17.50 |