The ESR Investigation of Brownish Ring at the Surface of Quartz Crucible Used for Cz-Si Crystal Growth
An ESR spectrum was observed for brownish rings formed at the surface of quartz crucible used in Cz-Si crystal growth. A signal assignable to the E′-center has been detected in the brownish ring. This result is explained by the dissolution of oxygen atoms of vitreous quartz crucible into liquid sili...
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| Veröffentlicht in: | Chemistry letters 1996-08, Vol.25 (8), p.627-628 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | An ESR spectrum was observed for brownish rings formed at the surface of quartz crucible used in Cz-Si crystal growth. A signal assignable to the E′-center has been detected in the brownish ring. This result is explained by the dissolution of oxygen atoms of vitreous quartz crucible into liquid silicon. |
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| ISSN: | 0366-7022 1348-0715 |
| DOI: | 10.1246/cl.1996.627 |