Properties of Mn-Cu Oxide Thin-Film Microthermistors Prepared Using a YAG Laser

Thin-film microthermistors were prepared from Mn-Cu layered thin-films using a YAG laser. A Mn thin-film and a Cu thin-film were continuously deposited on quartz substrates by the vacuum deposition method, then the YAG laser beam was irradiated to the layered thin-films in air and scanned at various speeds. After the processing the resistance of the layered thin-films increased and their thermistor constant reached within the range of 2500 to 4000K. The resistance and thermistor constant were controlled by the laser scanning speed and the number of scanning times. The electrical properties were more stable for heat cycles when the laser beam was scanned at low speeds.