Deposition of High Quality (Ti,Al)N Hard Coatings by Computer Automation Ion Plating

The mechanical properties of (Ti,Al)N hard coatings deposited by computer automation ion plating (CAIP) have been investigated. The results indicate that the (Ti,Al)N coatings with the thickness 27.3μm and 19.5μm were successfully directly deposited on the substrate through changing bias voltage dur...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Applied Mechanics and Materials 2013-09, Vol.432, p.82-85
Hauptverfasser: Lang, Wen Chang, Zhao, Sheng Sheng, Yan, Rong Ming
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The mechanical properties of (Ti,Al)N hard coatings deposited by computer automation ion plating (CAIP) have been investigated. The results indicate that the (Ti,Al)N coatings with the thickness 27.3μm and 19.5μm were successfully directly deposited on the substrate through changing bias voltage during deposition. The mechanical properties of the coatings with large thickness are excellent: the adhesion of film/substrate is higher, the residual stress is lower, and wear resistance is better.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.432.82