Deposition of High Quality (Ti,Al)N Hard Coatings by Computer Automation Ion Plating
The mechanical properties of (Ti,Al)N hard coatings deposited by computer automation ion plating (CAIP) have been investigated. The results indicate that the (Ti,Al)N coatings with the thickness 27.3μm and 19.5μm were successfully directly deposited on the substrate through changing bias voltage dur...
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Veröffentlicht in: | Applied Mechanics and Materials 2013-09, Vol.432, p.82-85 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The mechanical properties of (Ti,Al)N hard coatings deposited by computer automation ion plating (CAIP) have been investigated. The results indicate that the (Ti,Al)N coatings with the thickness 27.3μm and 19.5μm were successfully directly deposited on the substrate through changing bias voltage during deposition. The mechanical properties of the coatings with large thickness are excellent: the adhesion of film/substrate is higher, the residual stress is lower, and wear resistance is better. |
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ISSN: | 1660-9336 1662-7482 1662-7482 |
DOI: | 10.4028/www.scientific.net/AMM.432.82 |