Effects of Modified Materials on Plasma in Surface Modification by CF4 Plasma

Effects of Modified Materials on Plasma in Surface Modification by CF4 Plasma

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Veröffentlicht in:Journal of Photopolymer Science and Technology 2004, Vol.17(2), pp.177-178
Hauptverfasser: Katoh, Masaaki, Shirai, Masami, Ohte, Takeo, Kojima, Akira
Format: Artikel
Sprache:eng
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CF4 plasama
Mass spectra
Optical emission spectra
Surface modification
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container_title Journal of Photopolymer Science and Technology
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subjects CF4 plasama
Mass spectra
Optical emission spectra
Surface modification
title Effects of Modified Materials on Plasma in Surface Modification by CF4 Plasma
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