F2 Laser Resist with Fluorinated Polymers

Fluorinated organic compounds are applied as F2 laser resists due to their high transparency at 157nm. The relationship between numbers/positions of fluorine atoms in a repeating unit of the fluorinated polymers and their physical/chemical properties (solubility parameter and hydrophilicity) for F2 laser resist is discussed. Fluorine at suitable position improves hydrophilicity without lowering the solubility parameter. We propose a novel polymer suitable for F2 excimer laser resists consisting of the polymer with fluorine atoms connecting to proper positions.