Detection of Deposition Rate of Plasma-Polymerized Films with a Quartz Crystal Microbalance

The deposition rates of plasma-polymerized (pp-) films of vinyl acetate, vinyl trifluoroacetate, vinyl 2-chloroacetate, vinyl butanoate, vinyl pivalate, vinyl 2-butenoate, vinyl hexanoate and styrene are determined by the quartz crystal microbalance. Using the same polymerization conditions (100W RF and 100 Pa vapor pressure) for the various monomers, the deposition rates were determined to be constant within the interval measured. The deposition rates of pp-vinyl acetate, pp-vinyl trifluoroacetate, pp-vinyl 2-chloroacetate, pp-vinyl butanoate, pp-vinyl pivalate, pp-vinyl 2-butenoate, vinyl hexanoate and pp-styrene were scattered on the different position of measure on the position of the lower electrode in the plasma polymerization equipment. The average deposition rate of pp-vinyl acetate was 0.28μg/min. The average deposition rate of pp-vinyl trifluoroacetate was higher by 15 times, and that of pp- vinyl 2-chloroacetate was higher by 23 times than that of pp-vinyl acetate. The average deposition rate depended on the chemical structure of the monomer.