ENVIRONMENTALLY FRIENDLY WATER-SOLUBLE RESISTS VIA CHEMICAL AMPLIFICATION

Recent advances in water soluble resists have enabled the fabrication of large field electric devices without using organic solvents. However, the sensitizers used for these resists, such as diazo compounds, are toxic. We have therefore been trying to develop a new water soluble resist using a chemically amplified vinyl system, since this system requires a relatively small amount of sensitizers. This paper describes a new negative resist using a novel cross-linking reaction of vinyl acetal polymers as the major reaction step.