Nanogold Aggravating MEMS Cantilever Piezoelectric Optical Detection Biochip

A kind of array micro-electromechanical systems (MEMS) cantilever of biochip is designed, which piezoelectric devices drive MEMS cantilever resonance. Before and after hybridization reaction, by the change of the resonant frequency of the cantilever, it can detect the cantilever amplitude through optical detector to judge whether the solution containing the cantilever probe genes. In order to improve detection sensitivity, it aggravate cantilever by gold nanoparticles combining hybridization information, applying Au-S chemical bond of gold nanoparticles and dithiol HS(CH2)6SH to combine and fix DNA probe and applying target DNA marked with biotin to combine gold nanoparticles by Biotin - Streptavidin combining. The results shows that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.