Effect of Catalytic Time Variation on Silica Antireflective Coatings

Effect of Catalytic Time Variation on Silica Antireflective Coatings

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly...

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Veröffentlicht in:Applied Mechanics and Materials 2012-01, Vol.121-126, p.80-84
Hauptverfasser: Han, Xiang Ju, Cai, Zhi Duan, Yan, Tao, Jin, Rui Min, Cang, Li Min
Format: Artikel
Sprache:eng
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Zusammenfassung:Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.121-126.80