Investigation and Evaluation on Pollution and Disposal of Integrated Circuit Project

To study the environmental impact of a project of 8 inches integrated circuit chip (8IICCP), investigation and analysis on engineering features, process flow, pollution and treatment of waste water, waste gases, and waste solids were done in this paper. The results showed that it would produce industrial 4110 m3/d of wastewater in the production in which 2920 m3/d of process waste water needed to be treated. After being treated, F-, NH3-N, Phosphate, COD(Chemical Oxygen Demand), TOC(Total Organic Carbon) and SS(Suspended Solid) concentrations in effluent of industrial wastewater would be 1.85 mg/L, 1.85 mg/L, 0.32 mg/L, 119.7 mg/L, 58.7 mg/L and 34.2 mg/L respectively. It also would produce many kinds of waste gases in which 4 kinds of them needed to be treated by local scrubber systems respectively. After being treated, the emissions can satisfy the demand. All predicted results can meet the requirements of relevant state standards. Moreover discharging volume of waste liquids and solids and their treating plan had been presented. This project is feasible on aspects of water, air and waste solid environmental influence.