Quantum State in Fabricating Silica Antireflective Coatings

Quantum State in Fabricating Silica Antireflective Coatings

Based on TEOS system and sol-gel process, together with catalysts, Antireflective coating films prepared by sol—gel on glass substrate have been processed by rapid thermal annealing (RTA). the refractive index and thinkness of SiO2 film is exactly controlled. The films are characterized by ellipsomet...

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Veröffentlicht in:Applied Mechanics and Materials 2013-01, Vol.271-272, p.247-250
Hauptverfasser: Cai, Zhi Duan, Yan, Tao, Cang, Li Min, Jin, Rui Min
Format: Artikel
Sprache:eng
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Zusammenfassung:Based on TEOS system and sol-gel process, together with catalysts, Antireflective coating films prepared by sol—gel on glass substrate have been processed by rapid thermal annealing (RTA). the refractive index and thinkness of SiO2 film is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The quantum states in these processions are found and discussed.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.271-272.247