Effect of Different Temperatures on Fabricating Silica Antireflective Coatings

Effect of Different Temperatures on Fabricating Silica Antireflective Coatings

Based on TEOS system and sol-gel process, together with catalysts, Antireflective coating films prepared by sol—gel on glass substrate have been processed by furnace thermal annealing (FA). the refractive index and thinkness of SiO2 film is exactly controlled. The films are characterized by ellipsome...

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Veröffentlicht in:Applied Mechanics and Materials 2013-01, Vol.271-272, p.251-254
Hauptverfasser: Jin, Rui Min, Zhang, Li Na
Format: Artikel
Sprache:eng
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Zusammenfassung:Based on TEOS system and sol-gel process, together with catalysts, Antireflective coating films prepared by sol—gel on glass substrate have been processed by furnace thermal annealing (FA). the refractive index and thinkness of SiO2 film is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The effect of different temperatures in these processions are found and discussed
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.271-272.251