The Influence of Electrochemical Anodization for Porous Silicon Microcavity Fabrication

The present work reports the electrochemical anodization for porous silicon microcavity (PSM) fabrication, including the number of layers and electrochemical process effect in the optical response quality of PSM. These PSMs have been obtained by using PS technology. It is found that the electrochemical process limits the maximum number of layers because there is a chemical dissolution effect during electrochemical anodization. The reflectance spectra of the PSMs indicates that stop-band and the resonant peak of the PSM shift down with the increases of the number of layers due to the decrease of layer's thickness. The value of the full width at half maximum (FWHM) dependents on the number of layers, and the number of layer increases when the FWHM decreases, which is due to the light scattering at roughness interface layer.