Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage

The proposed approach is to design a tracking controller for five degree-of-freedom coplanar nanostage which can provide high precision applications. This study propose a viscoelastic creep model, it was modeled as a series connection of springs and dampers to describe the creep effect. Then, utilize a PI controller using Taguchi method to search the optimization parameters to suppress the tracking error. Finally, a cross-coupling control scheme is proposed to eliminate the contour error which is typical in dual-axes tracking control problem. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability.