Design and Fabrication of Micro-Coil Sensor Array by Using UV-LIGA Process

A micro-coil array is designed and fabricated in this contribution by MEMS (Micro Electro Mechanical Systems) approach. The array’s width is from a dozen microns to several tens of microns. UV-LIGA process is used to fabricate the array by means of sputtering, lithography and electroforming. The sensor array is based on 300μm thick silicon wafer, and is composed of single excitation Cu coils, two serial detection coils. Detection coils are sized from 10μm×10μm, 20μm×15μm to 30μm×15μm respectively, with 10 turns. Successful fabrication of the micro-coil sensor demonstrates the feasibility of UV-LIGA process for miniaturization of micro-coils.