Fabrication of Au Micro-Electrodes on Polyimide Films Using Transfer Printing Techniques

Transfer printing of Au micro-electrode patterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. Here, the line and space patterns with widths of 25 μm and 100 μm were successfully transfered on polyimide films at a molding temperature of 150 °C for 3 min under the molding pressure of 2.5 MPa. This technique is expected to provide simplified processes to fabricate electrode patterns on microelectro mechanical systems (MEMS).